기술자료
Material Parts
Unit
Al
2
O
3
Y2O3
ZrO2
SiC
Density
g/cm3
> 3.9
> 5.0
> 6.0g/cm3
> 3.1g
Purity
%
99.7
99.99
3mol% YSZ
99
Mechanical
Hardness
GPa
15
6
13
23
Strength
MPa
400
110
1,000
500
Toughness
MPa·m1/2
3.5
1.2
12
4.0
Thermal
Conductivity
W/mK
30
14
2.0
180
Expansion
10-6/K
8.0
8.0
10
4.5
Shock Resistance
℃
> 200
120
350
400
Electrical
Dielectric Constant
-
10
12
-
-
Volume Resistivity
Ωcm
10
16
10
15
10
16
10
6
Application
Semiconductor
LCD
Industrial
Ceramic
Semiconductor
Milling Machine
Grinding Media
Semiconductor
High
Temp
Strength