기술자료 Material Parts
 
 
  Unit Al2O3 Y2O3 ZrO2 SiC
Density g/cm3 > 3.9 > 5.0 > 6.0g/cm3 > 3.1g
Purity % 99.7 99.99 3mol% YSZ 99
Mechanical Hardness GPa 15 6 13 23
Strength MPa 400 110 1,000 500
Toughness MPa·m1/2 3.5 1.2 12 4.0
Thermal Conductivity W/mK 30 14 2.0 180
Expansion 10-6/K 8.0 8.0 10 4.5
Shock Resistance ℃ > 200 120 350 400
Electrical Dielectric Constant - 10 12 - -
Volume Resistivity Ωcm 1016 1015 1016 106
Application Semiconductor
LCD
Industrial
Ceramic 		Semiconductor Milling Machine
Grinding Media 		Semiconductor
High
Temp
Strength