인사말
회사개요
연혁
조직도
거래처
오시는 길
ENGINEERING PARTS
Developed Products
- CMP Vision System (RSDS-100)
- CMP Ebara Rotary Joint
  (TS-NRJ-110)

- CMP Cylinder Pad Conditioner
  System (TSCM-PC001)

- Pad Conditioner Monitoring
  System(TS-HSC-400)

- CMP LK Spindle Gap Monitoring
  System (TS-HSC-400)

- Facility Supply Box (TS-FSBD9)
- KE R AXIS (D4CX30709)
- Others
Repair item
- CMP Conditoner Arm Base
  (0010-33061)

- CMP LK Conditioner Head
  (0010-32017)

- CMP Head Spindle Shaft
  (0010-30256)

- CMP Ebara S1 Rotary Joint
  (MS-J0021-01)

- CMP Ebara S2 Rotary Joint
  (MS-J0066-3S)

- CMP MKS Precision ontroller
  (0190-24854)

- KE Shutter Cylinder
HEATER
RUBBER HEATER
MANTLE HEATER
OTHERS
CONTROLLER
MATERIAL PARTS
각종 Meterial가공 및 Jig 제작
- Sapphire, Quatrs, Si
- Ceramic
OTHERS
-Porous Chuck (Vacuum) Table
-Photo / Stepper Chuck & Stage
-ESC (Electostatic Chuck)
-Probe Card
-Heat sink, Acoustic, Water
 Proof Thermal Interface
HEATERS
RUBBER HEATER 관련
MANTLE HEATER 관련
Material Parts
Material Characteristics
공지사항
Q&A